The ECT manufacturing process developed by Micro-Epsilon now also changes the capacitive sensor technology. ECT stands for "Embedded Capa Technology”. The sensors concerned are known as “capaNCDT CSH”. The actual measuring cell of the sensors consists of a special substrate, which results in particularly high thermal stability and durability. New sensor geometries are also possible, which enable the production of a sensor with a height of just 4mm. This very flat sensor is called the “capaNCDT CSH-FL”. Using two bore holes on the sensor, these flat sensors can be mounted quickly and easily. The cylindrical sensors can be mounted as before by clamping. The sensors are also available for use in ultra-high vacuums (UHV) and in clean rooms where, for example, freedom from contamination of airborne particles and materials is critical. A triaxial vacuum feedthrough has been developed for this application, the first of its kind in the world, which enables the sensor signals to be transferred reliably in the UHV. The sensors have even been installed near the absolute zero point at minus 270°C in a particularly challenging application. There are two significant benefits due to the integrated cable on the side of the sensor: The installation space is significantly reduced and so the risks associated with using an additional plug connector, e.g. accidental detachment, are prevented. Customer requirements can be responded to very quickly with the new technology, as the sensor is modular in its design. The CSH sensors are now available with measuring ranges between 0.2mm and 1.2mm. Other measuring ranges are already being developed. The hybrid sensors therefore supplement the previous range of sensors. The sensors are compatible with all electronics units supplied by Micro-Epsilon.