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Capacitive spirit level for high-precision position measurements

The CHLS4 capacitive hydrostatic levelling system from Micro-Epsilon is based on the hose level principle and is used to monitor changes in the height of building parts and pipe systems. The sensor system detects minute changes in height through changes of a correlating water level with sub-micron accuracy. The CHLS4 is used, for example, in particle accelerators. It checks the position of the tubes or the position of the concrete foundations in relation to each other.Since the change in position has to be balanced again, there are actuators attached to the blocks which correct the respective supports by the measured height difference. Those actuators must also be controlled using capacitive sensors.